User-specific individual control for ratio distribution! A distribution controller suitable for mixed gas control and gas supply to chambers.
This product is a flow ratio controller that controls flow distribution by ratio. It provides advanced mass flow total solutions through domestic technology. It is equipped with a mechanism that allows users to individually control the Flow Ratio Set values for each Slave. There are both separated and integrated models available, flexibly accommodating from a minimum of 2 channels to a maximum of 6 channels. Furthermore, it realizes a quality management system that supports the construction and operation of MES or ERP-based production operation systems, as well as development and quality control systems. 【Features】 ■ Flow distribution control by ratio (integrated/separated) ■ Supports from a minimum of 2 channels to a maximum of 6 channels ■ Individual control of Flow Ratio Set values for each Slave *For more details, please download the PDF or feel free to contact us.
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basic information
【Specifications (Partial)】 ■Flow Range (Equivalent to N2): 300 SCCM - 20 SLM ■Channels: 2ch - 6ch (Separated), 2ch - 4ch (Integrated) ■Input Ratio Control Range: 0%, 2 - 100% (Each CH) ■Response Time: <= 3.0 Sec ■Reproducibility: <= +/- 0.3% of Full Scale ■Valve Type: Solenoid V/V (N.O) *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Mixed gas control ■Control at mixing points ■Gas supply to process chambers *For more details, please download the PDF or feel free to contact us.
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Founded in 1992 with the purpose of "serving the world," we have been importing and selling automatic control devices, which are core components of the factory automation industry, and have continued to grow based on the trust of our customers.
