[Yield Improvement] Vacuum Chuck for Ultra-Thin Glass and Film | Zero Adhesion Marks

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Nanotem Inc. / Aerofix

last updated：Sep 16, 2026

ナノテム

<Free sample available!> Are you struggling with defects caused by adhesion marks or the need to change chucks for each workpiece? Uniformly secure thin materials on a surface with 2μm pores!

Are you struggling with yield loss due to "suction marks" or "distortion and cracks" that occur when adhering thin glass or films? The porous ceramic vacuum chuck "Aerofix" holds the entire workpiece uniformly with ultra-fine and uniform pores of 2μm. It eliminates localized suction loads like those found in traditional perforated chucks, preventing deformation and damage to delicate thin workpieces. 【Main Features】 ■ Reduces exchange labor: Supports partial suction, eliminating the need to change chucks for each workpiece size change. ■ Streamlines polishing processes: Significantly reduces related processes such as wax fixation and cleaning during polishing. ■ No additional equipment required: Reduces ionizer installation costs due to the material's inherent static elimination properties. ■ Immediate operation with simple placement: Easy introduction with a "top plate" that simply sits on existing chucks. ■ Compatible with special environments: Dust-free operation. Supports high temperatures up to 150°C, wet environments, and roll shapes. ■ Customizable: Composition, shape, and size adjustments are possible according to application needs. Flexible response to technical requests. Currently, we are accepting requests for free sample loans and on-site experiments where you can directly test the effects with your existing workpieces! ＼ Please download the product documentation to check the details. Feel free to contact us! ／

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【Examples of Introduction Benefits】 ◎ Elimination of suction marks and warping Flat and distortion-free adhesion and fixation of films and ultra-thin substrates for high-speed transport. ◎ Reduction of wax fixation and cleaning processes Eliminates the need for waxing, peeling, and cleaning during the polishing of artificial sapphire substrates and LCD/LEDs, contributing to improved work efficiency and cost reduction. ◎ Precise and stable levitation transport Non-contact levitation (precise levitation) facilitates focusing in processes such as laser annealing, contributing to improved quality and work efficiency. ◎ Prevention of foreign matter contamination and static electricity issues Eliminates contamination and charging risks that lead to reduced yield, thanks to no dust generation from within and excellent charge removal properties. *For more details, please refer to the materials. Feel free to contact us as well.