From a super micro flow rate of 0.1 mL/min to 20 L/min, gas flow is controlled with high precision.
The Bürkert mass flow controller Type 8733 is a compact MFC that accommodates ultra-low flow rates from 0.1 mL/min to a maximum of 20 L/min. With high-precision mass flow measurement and proportional control, it stably regulates small gas flows. The sensor, control unit, and proportional valve are integrated into a compact body, contributing to the miniaturization and high density of analytical devices and measurement/testing equipment. It also supports digital communication via Modbus RTU, making it suitable for a wide range of applications including carrier gases, calibration gases, semiconductor testing, material evaluation, and research/laboratory equipment.
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basic information
- Flow range: 0.1 to 20,000 mL/min *0.1 to 40 mL/min is a custom specification. Confirmation of specifications is required depending on usage conditions and gas type. - Accuracy: ±0.5 to 1% of measured value + ±0.25 to 0.5% of full scale - Repeatability: ±0.1% of full scale - Maximum pressure: 7 bar(g) - Signal/communication: Analog communication, Modbus RTU - Power supply: DC 24 V - Connection: G1/8, NPT1/8, manifold - Fluid temperature: -10 to +70℃
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Applications/Examples of results
Gas measurement devices, analysis devices, inspection and evaluation devices, research and laboratory equipment.
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Company information
Founded in 1946 in Southern Germany, Bürkert has been a long-established manufacturer of fluid control equipment for over 70 years, producing valves, solenoid valves, sensors, mass flow controllers, and more for various applications. Today, we have five factories in Germany and France and have grown into a global company with sales offices in 37 countries. Bürkert Japan, celebrating its 25th anniversary, offers a lineup of products tailored to Japanese standards and practices. In recent years, the introduction of IoT in many production sites has become a hot topic, with discussions not only on efficiency and cost reduction but also on predictive maintenance and smart solutions leveraging IoT. Bürkert provides solutions that easily achieve automatic regulation with IoT devices for process automation. We support various communication formats to realize IoT applications that are beneficial on-site. We offer a wide range of solutions, not only providing individual components like control valves and sensors but also system proposals, so please feel free to consult with us.