Detects foreign objects and defects by comparing with the master image! A system equipped with automatic position correction and area-specific specification setting functions.
This product is a system that accurately distinguishes by registering a normal surface as a master and comparing it with inspection images. By comparing with the registered image, it detects foreign objects, scratches, dirt, and pattern defects attached to the image surface. It performs alignment deviation inspection and dimensional inspection using the display of the alignment pattern's position, measuring the area and size (maximum diameter) of foreign objects, and distinguishing between good and defective products. The inspection result data is filed and accumulated. Additionally, it allows for full surface movement inspection in conjunction with a prober (or XY stage) and automatic correction of positional deviations. 【Features】 - Automatic correction of positional deviations between master images and inspection images - Individual judgment conditions can be set for different screen areas (up to 10 specs) - Supports detection of foreign objects, scratches, dirt, and pattern defects, as well as dimensional inspection - Inspection result data is filed and saved - Full surface movement inspection in conjunction with a prober (or XY stage) *For more details, please download the PDF or feel free to contact us.
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basic information
【System Configuration】 ■ CCD Digital Camera ■ Z1 Axis, Z2 Axis, θ1 Axis, θ2 Axis, X Axis, Y1 Axis, Y2 Axis ■ Camera Power Supply ■ Computer ■ Stage & Support Control Unit ■ Camera Board Control Board (PIO-16/16(PCI)) (PIO-32/32(PCI)) ■ I/O Control Unit ■ Actuator Control Unit *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Purpose】 ■ Detection of foreign substances, scratches, dirt, and pattern defects on the image surface ■ Inspection of alignment misalignment ■ Dimensional inspection *For more details, please download the PDF or feel free to contact us.
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Company information
Since our company's establishment in 1986, we have long been engaged in semiconductor-related businesses that support Japan's cutting-edge technology. On the hardware side, we have developed construction and manufacturing environments, including clean rooms. On the human resources side, we have focused on training semiconductor engineers and establishing a service system that can promptly respond to customer needs. Last year, we participated in SEMICON Japan for the first time, and by directly interacting with many industry stakeholders, we were able to learn again what is currently needed and what services should be created. At the same time, the morale within the company has been rising, and we are actively conducting sales activities. It is said that the Japanese economy is finally showing signs of recovery. However, even just looking at the semiconductor industry, the entry of overseas manufacturers and the significant improvement in technology and services are remarkable, so we aim to enhance our international competitiveness in our sales expansion. Not only domestically but also in response to the era of globalization, our role as a hub connecting North America and Asia, especially given our excellent airport access, will further increase.
