Automatic spin cleaning device equipped with a clean unit.
Cassette-type automatic device equipped with a clean unit that allows you to select option contents (the photo shows scrubbing cleaning + UV cleaning + hot plate) =============================================== <Specifications> Work size…Φ2 inches to Φ8 inches Transport…Atmospheric 3-axis clean robot Clean unit…HEPA filter Cleaning…Brush, MS standard equipment Options…High-pressure jet nozzle, UV, excimer, hot plate, etc. Utilities…Power supply, compressed air, nitrogen, pure water, exhaust, waste liquid, others
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Cassette-type automatic device equipped with a clean unit that allows you to select option contents (the photo shows scrub cleaning + UV cleaning + hot plate) =============================================== <Specifications> Work size…Φ2 inches to Φ8 inches Transport…Atmospheric 3-axis clean robot Clean unit…HEPA filter Cleaning…Brush, MS standard equipment Options…High-pressure jet nozzle, UV, excimer, hot plate, etc. Utilities…Power supply, compressed air, nitrogen, pure water, exhaust, waste liquid, others
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We design, manufacture, and sell various types of equipment for both testing and research purposes as well as production automatic devices, including various front-end (photoresist-related) devices and manual spin coaters (for Si, LCD glass, compounds, etc.). [Testing and Research Development, Production Related Equipment for Semiconductors and LCDs] Various cleaning machines (wet, dry), spin coaters, mask aligners, developing and etching equipment, various vacuum devices, probers, and drillers for film thickness measurement, etc.