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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Etching Equipment
  6. Multipurpose processing device (spin processor)

Multipurpose processing device (spin processor)

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TMS-401

last updated:Oct 01, 2010

トービ
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Low-cost multipurpose processing device customizable for cleaning, developing, etching, etc.

This is a compact tabletop multi-purpose processing device ideal for research and development. 【Features】 - Customizable for various applications such as etching, cleaning, developing, stripping, and drying. - Made with PVC body material to withstand acids and solvents. - Compact tabletop design saves space and is offered at a low price. 【Specifications】 Work size: Φ8 inches or up to 200×200 Clean unit: HEPA filter Cleaning method: Spin cleaning + brush or MS selection Rotation speed range: 100 to 2,000 rpm Rotation speed setting: Volume setting Acid and alkali resistant specifications: Body made of acid and alkali resistant material (PVC) Solvent resistant specifications: Body compatible with various solvents such as IPA and acetone (SUS) Options: High-pressure jet nozzle, chemical nozzles, various filter compatible bodies, chemical circulation, etc. ■Others■ We handle semiconductor-related equipment such as tabletop spin coaters, exposure devices, stripping devices, vacuum devices, and measurement devices. ◆◇For more details, please download the catalog◇◆

    Etching EquipmentOther semiconductor manufacturing equipment
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Multipurpose processing device (spin processor)

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This is a compact tabletop multi-purpose processing device ideal for research and development. 【Features】 - Customizable for various applications such as etching, cleaning, developing, stripping, and drying. - Made of PVC body material, resistant to acids and solvents. - Compact tabletop design saves space and is offered at a low price. 【Specifications】 Work size: Up to Φ8 inches or 200×200 mm Clean unit: HEPA filter Cleaning method: Spin cleaning + brush or MS selection Rotation speed range: 100 to 2,000 rpm Rotation speed setting: Volume setting Acid and alkali resistant specifications: Body made of acid and alkali resistant material (PVC) Solvent resistant specifications: Body compatible with various solvents such as IPA and acetone (SUS) Options: High-pressure jet nozzle, chemical nozzles, various filter compatible bodies, chemical circulation, etc. ■Others■ We handle semiconductor-related equipment such as tabletop spin coaters, exposure devices, stripping devices, vacuum devices, and measurement devices. ◆◇For more details, please download the catalog◇◆

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Applications/Examples of results

There are various devices such as etching equipment, cleaning equipment, developing equipment, tabletop spin coater, exposure equipment, stripping equipment, vacuum equipment, and measuring equipment.

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Semiconductor Process Equipment Catalog

Semiconductor Process Equipment Catalog

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Electronic Components and Semiconductors

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We design, manufacture, and sell various types of equipment for both testing and research purposes as well as production automatic devices, including various front-end (photoresist-related) devices and manual spin coaters (for Si, LCD glass, compounds, etc.). [Testing and Research Development, Production Related Equipment for Semiconductors and LCDs] Various cleaning machines (wet, dry), spin coaters, mask aligners, developing and etching equipment, various vacuum devices, probers, and drillers for film thickness measurement, etc.

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