Resistance rate / Sheet resistance measuring instrument [WS-3000]
Napson Co., Ltd. develops, manufactures, and sells various measurement systems for semiconductor wafers and FPD substrates. We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare. We have other products available, so please contact us for more details.
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basic information
Optimal Automatic Thin Film Sheet Resistance Meter for Semiconductor Process Evaluation ◆ Rotary function allows for the attachment of four types of probe heads, eliminating the need for probe exchange for each measurement sample ◆ Dual mode enables high-precision measurement down to 1mm edge ◆ Excellent cost benefits due to high-speed measurement ◆ Proven measurement capability for thin films of 3nm ◆ Standard equipped with FOUP (optional: SMIF/AM3000), GEM/SECS compatible (*For further details, please contact us.)
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Applications/Examples of results
Semiconductor process films (epitaxial, diffusion, ion implantation, polysilicon), metal films, silicon wafers.
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We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare.