Resistance rate / Sheet resistance measuring instrument [NC-80MAP]
Napson Corporation develops, manufactures, and sells various measurement systems for semiconductor wafers and FPD substrates. We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and our extensive experience, from specification design to aftercare. We have other products available, so please contact us for more details.
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basic information
Non-contact sheet resistance multi-point measuring instrument for compounds such as GaAs epitaxial layers, GaP, GaN, etc. ◆ Full-range measurement with up to 4 sensors ◆ Multi-point measurement possible from 6mm around the periphery ◆ SPC software (time variation) function ◆ Mapping software with up to 217 points (optional) ◆ System compatible with fully automated transport mechanism (optional) ● Target wafer sizes: 2 inches to 6 inches (optional: 8 inches) (*) For more details, please contact us.
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Applications/Examples of results
GaAs epitaxial layer, GaN on sapphire substrate, AlGaN, etc.
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We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare.