Thin film devices fabricated by chemical vapor deposition using proprietary technology.
A thin film device that measures surface temperature using a resistance temperature sensor (RTS) and measures heat flux using a heat flow sensor, both chemically vapor-deposited on an aluminum nitride substrate using proprietary technology.
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**Overview** HFM: The heat flux micro-sensor is a thin-film device that measures surface temperature using a resistance temperature sensor (RTS) and measures heat flux using a heat flux sensor, both chemically vapor-deposited on a silicon nitride aluminum substrate using proprietary technology. This heat flux sensor is a differential thermopile, consisting of a three-layer composite pattern made up of thermocouples and thermal resistance layers arranged in high density with high precision. When heat flows into or out of the surface of the HFM, a temperature difference occurs in the thermal resistance layer sandwiched between each thermocouple pair, generating a voltage proportional to the amount of heat flowing in or out. **Features** - Fastest response time (approximately 6 μs) - Operates up to 850°C without external cooling - Low noise - Ten times more sensitive than conventional thin-film sensors - Measures heat flux and temperature on the sensor surface - Equal sensitivity to conduction, convection, and radiation For other functions and details, please contact us.
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Applications/Examples of results
【Examples of Applications】 - Observation of heat transfer conditions on engine inner walls - Traverse experiments of rocket engines - Turbine blade hot wind tunnel tests - Automotive airbag safety tests - Jet engine backfire tests
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