An essential tool for measuring wafer temperature distribution.
Customized products. Wafer sizes of 5, 8, and 12 inches, thermocouple sensor points of 1, 5, and 9 points, and various specifications such as insulation coatings of Teflon, alumina fiber, and quartz can be selected. Specifications other than the standard can also be manufactured. 【Features】 ○ A test report (free of charge) is attached to all products ○ Regular calibration is also available For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Thermocouple-equipped silicon wafers, essential for the development of semiconductor manufacturing equipment, process condition setting, and temperature distribution measurement, provided by the temperature measurement instrument specialist, Ando Keiki. ○ Achieves a high-strength thermal contact fixing part with a tensile load of over 200g. ○ Improves reproducibility by minimizing the impact of accuracy drift due to aging of the thermocouples. ● For more details, please contact us or download the catalog.
Price information
180,000 to 540,000 yen. Please contact us.
Delivery Time
P3
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Applications/Examples of results
【Purpose】 ○ Temperature measurement of wafers in the front-end semiconductor manufacturing process ● For more details, please contact us or download the catalog.
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Company information
If you're measuring temperature, choose Anritsu Instruments. We have over 10,000 types of temperature sensors. From being a pioneer in surface temperature measurement to becoming a total planner for temperature measurement, we are a specialized manufacturer of temperature measuring instruments. Anritsu Instruments aims to be a company that, backed by "trust," discusses the future together and steadily takes steps toward its realization.