Achieving low pressure loss while maintaining a high filtration precision of 0.003μm!
This is an inline ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. It can handle approximately twice the flow rate with the same external dimensions as the conventional PGF series.
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basic information
Product Features - High filtration accuracy of 0.003m particles and above - Recommended flow rate: 20 to 400 L/min - Lineup optimized for etching and thin film formation with high flow rates and filtration accuracy - Cost reduction due to maintenance-free operation - High flow processing with low pressure loss - High corrosion resistance
Price information
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Delivery Time
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Applications/Examples of results
Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.
Line up（4）
| Model number | overview |
|---|---|
| PGFL-2-＊＊＊＊ | Flow rate guideline 80-160 SLM |
| PGFL-3-＊＊＊＊ | Flow rate guideline 20-80 SLM |
| PGFL-4-＊＊＊＊ | Flow rate guideline 160-400 SLM |
| Fittings available: VCR, Swagelok, UPG. Various sizes available: 1/4”, 3/8”, 1/2”, 3/4”. |
Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.