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  6. Low pressure loss inline ceramic gas filter

Low pressure loss inline ceramic gas filter

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UCF Series

last updated:Jun 20, 2012

ピー・ジェイ
ピー・ジェイ
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Filtration accuracy

This is an inline ceramic gas filter manufactured by Pureon Japan Co., Ltd., used in semiconductor manufacturing gas lines and other applications.

    CVD EquipmentSemiconductor inspection/test equipmentGas Filters
UCFシリーズ.jpg

Low pressure loss inline ceramic gas filter

UCFシリーズ.jpg
UCFシリーズ.jpg

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basic information

【Features】 ○ Filtration accuracy is 0.01μm. ○ Recommended flow rate is 10-160L/min. ○ Design pressure is 17MPa (2,465PSIG) at 20℃. ○ Particle removal performance for 0.01μm particles is 99.999999999%. ○ Low pressure loss. ● For more details, please contact us or refer to the catalog.

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Applications/Examples of results

Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.

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ピー・ジェイ

ピー・ジェイ

Electronic Components and Semiconductors

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PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.

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