Significantly improve yield.
This is a gas filter manufactured by Purelon Japan Co., Ltd. All filter components are made of SUS316L, ensuring high corrosion resistance and excellent heat resistance without the risk of secondary generation of substances. When nitrogen gas (N2) is flowed at an inlet pressure of 0.2 MPa, the outlet pressure loss is △0.05 MPa, achieving a flow rate of 90 SLM. Additionally, under steady flow and pulsation conditions, a filtration precision of 0.003 μm has been confirmed using CNC, significantly improving yield in submicron ULSI manufacturing.
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basic information
【Features】 ○ Filtration accuracy is 0.003μm. ○ Recommended flow rate is 10-100 L/min. ○ Maximum operating pressure is 0.98 MPa (142 PSIG) at 20°C. ○ Maximum operating temperature is 460°C. ● For more details, please contact us or refer to the catalog.
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Applications/Examples of results
Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.
Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.
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