Low-pressure operation ECR type atom source
It generates an atom flux from ECR-excited plasma. This atom source, based on the ECR method, has excellent low-pressure operating characteristics. This filamentless structure of the atom source can produce atom flux from gas species such as nitrogen, hydrogen, and oxygen.
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basic information
It generates an atom flux from ECR excited plasma. This atom source, based on the ECR method, excels in low-pressure operating characteristics. This filamentless structure atom source can produce atom flux from gas species such as nitrogen, hydrogen, and oxygen.
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Applications/Examples of results
This is a product for research purposes. It assists in the formation of oxide films and nitride films, and is applicable for the formation of chemical termination surfaces, oxidation and reduction reactions, and promoting reactions on substrate surfaces.
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Have you ever experienced that even when you devise original experimental equipment, it is difficult to convey your intentions to the manufacturer? In experiments using a vacuum, I believe that "vacuum" often merely provides an essential environment for the experimental system. However, many constraints arise from the use of "vacuum," requiring various innovations in the design of the system. Our service is characterized by a complete system that proposes scientific requirements using engineering methods and actually manufactures and establishes the system.