A wide range of measurements from atmospheric pressure to high vacuum with this one device! A vacuum gauge with an integrated sensor, circuit, and display.
This is a hybrid vacuum gauge that combines a crystal gauge and a cold cathode gauge, covering wide-band measurements with a single unit. It can measure from atmospheric pressure to high vacuum without the need for switching operations, allowing for space-saving installation dimensions. By simplifying the structure, customers can perform sensor cleaning and sensor replacement themselves, enabling a reduction in downtime for production recovery! 【Features】 ■ Achieves a wide measurement range (10^5Pa to 10^-7Pa) ■ Reduces installation space for the vacuum gauge ■ The low vacuum section employs a crystal gauge for atmospheric pressure detection, achieving excellent stability on the low vacuum side ■ The high vacuum section uses a new, durable structure of CCG ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Other Features】 ■ The crystal gauge section for measuring from atmospheric pressure to low vacuum areas performs vacuum measurements by reading the changes in impedance caused by the friction between the quartz crystal and gas molecules. It offers excellent accuracy and reproducibility, enabling highly reliable measurements. ■ The cold cathode gauge section for high vacuum areas measures pressure by ionizing residual gas through magnetron discharge. Unlike hot cathode gauges, cold cathode gauges do not have filaments, allowing for robust and highly reliable measurements. * The CC-10 is an environmentally friendly product compliant with the RoHS directive.
Price information
NW25 connection: List price 236,000 (excluding tax)
Price range
P3
Delivery Time
P4
Applications/Examples of results
【Applications】 ■ Vacuum deposition equipment ■ Optical film generation equipment ■ Accelerator and UHV research ■ Electronic device manufacturing equipment ■ Device manufacturing equipment for optoelectronics, etc.
Line up（1）
| Model number | overview |
|---|---|
| CC-10-ICF70 | Ideal for those who want to achieve high vacuum, as it uses the flange of ICF70! |
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.