One device for measuring a wide range from atmospheric pressure to high vacuum! A vacuum gauge with an integrated sensor, circuit, and display. Compact and saves installation space!
This is a hybrid vacuum gauge that combines a crystal gauge and a cold cathode gauge, covering a wide measurement range with a single device. It can measure from atmospheric pressure to high vacuum without the need for switching operations, allowing for space-saving installation dimensions. Thanks to the simplification of its structure, customers can perform sensor cleaning and sensor replacement themselves, enabling a reduction in downtime until production resumes! 【Features】 ■ Achieves a wide measurement range (10?Pa to 10-?Pa) ■ Reduces the installation space for the vacuum gauge ■ The low vacuum section employs a crystal gauge for atmospheric pressure detection, providing excellent stability on the low vacuum side ■ The high vacuum section uses a new durable structure of CCG ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Other Features】 ■ The crystal gauge section for atmospheric pressure to low vacuum areas performs vacuum measurement by reading the change in impedance caused by the friction between the quartz crystal oscillator and gas molecules. It offers excellent accuracy and reproducibility, enabling highly reliable measurements. ■ The cold cathode gauge section for high vacuum areas measures pressure by ionizing residual gas through magnetron discharge. Unlike hot cathode gauges, cold cathode gauges do not have filaments, allowing for robust and reliable measurements. ○ The CC-10 is an environmentally friendly product compliant with the RoHS directive.
Price information
List price 242,800
Price range
P3
Delivery Time
P4
Applications/Examples of results
【Applications】 ■ Vacuum deposition equipment ■ Optical thin film generation equipment ■ Accelerator and UHV research ■ Electronic device manufacturing equipment ■ Device manufacturing equipment for optoelectronics, etc.
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.