The world's only spectroscopic ellipsometer technology for measuring pore rate and pore distribution using an EP (optical porosimeter).
No pre-treatment is required, and measurements can be taken quickly at 20 minutes per point compared to conventional methods.
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basic information
【Application】 - Measurement of pore ratio in low-k films - Measurement of pore ratio in dye-sensitized solar cells' TiO2 - Samples with pore sizes (0.5~65nm) and thickness (50nm~5μm) 【Features】 - Capable of measuring film thickness, refractive index, surface area, permeability, Young's modulus, and CTE - Measurements can be completed in a short time compared to conventional methods (20 minutes/point) 【Specifications】 - Measurable pore size (diameter): 0.5~65nm - Spot size: 1.2*0.8mm - Sample configuration: Measurable for both single-layer and multi-layer - Sample size: 2~300mm (film thickness: 50nm~5μm) - Measurement time: 20 minutes/point - Solvents: IPA (isopropanol), methanol, toluene, water
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Applications/Examples of results
- Measurement of pore ratio in low-K films - Measurement of pore ratio in TiO2 of dye-sensitized solar cells
Company information
Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.