Stitching Interference (SSI) Measurement Device
ASI(Q), ASI(Q)-XR, ASI(Q)-XRC, QIS
A stitching interferometer for measuring aspheres with high precision and speed without using null optical systems.
Using a sub-aperture, the surface of the test object is measured under optimal conditions for each part, and the measurement results of each part are combined to calculate the overall surface shape of the test object. Compared to conventional Fizeau interferometers, it becomes possible to measure a wider range of shapes with higher precision. [Product Lineup] 1. ASI(Q) - Can measure flat, spherical, and aspherical shapes up to 300mm in diameter. (Support for larger diameters is also possible) - Can measure a 90° slope (a completely hemispherical surface). - Capable of measuring aspheres with 1000λ. - Achieves high measurement accuracy and high lateral resolution. 2. QIS Interferometer - High slope measurement capability, providing fast and high precision results. - Can measure small radius test surfaces with a wide focus range. - Dramatically improves spot measurement capability in MRF.
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basic information
* What is SSI The SSI (Stitching Interferometry) system is equipped with a multi-axis drive control system and a Fizeau interferometer to automatically measure various parts of the test surface. During the measurement of each part of the test surface, fine adjustments are made to bring the interference fringes as close to null as possible. The obtained measurement results are stitched together using a stitching algorithm, resulting in the calculation of the shape data for the entire test surface. During the stitching process, real-time corrections for system errors are made from the measurement data, correcting for wavefront aberrations of the reference standard and control errors of the drive system, thereby obtaining the original shape information of the test surface. * Advantages of SSI The stitching interferometry method has four major advantages compared to conventional interferometry: 1. Wide measurement range – It can measure large diameters and high NA (Numerical Aperture). 2. High lateral resolution – Detailed shape information can be obtained. 3. High measurement accuracy – System errors are automatically corrected, allowing for the acquisition of the original shape information of the test surface. 4. Measurement of aspheres – No specialized null optics are required.
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Applications/Examples of results
Measurement of shapes of plane, spherical, aspherical, and freeform surfaces.
Company information
QED is a development manufacturer based in Rochester, New York. With its core technologies of MRF, an advanced polishing technology, and SSI, a high-precision aspheric measurement technology, it meets various needs in the precision optics industry. MRF is a polishing technology that uses a magnetic fluid to generate a polishing tool a few millimeters in size, which scans the entire optical surface to correct its shape with high precision. Regardless of the size or tilt of the workpiece's shape, it finishes the optical surface to a perfect shape. SSI is an interferometric measurement technology that connects the results of interference measurements from multiple sub-apertures, enabling high-precision measurement of the entire inspected surface. It allows for the measurement of aspheres and freeform surfaces without the need for dedicated null optics. Since its establishment in 1996, over 300 MRF/SSI devices have been utilized by more than 100 users worldwide.
