Water-sealed vacuum pump unit suitable for the suction of gases containing water droplets and water vapor!
The "Vacuum Pump Unit P94" is a unit used as a vacuum source to hold the workpiece while cutting it with a chemical solution. It is used as a vacuum generation device for the wafer vacuum chuck of a dicing machine and consists of a water-sealed pump, control valve, flow meter, vacuum pressure gauge, and other components. 【Features】 ■ A water-sealed vacuum pump unit for vacuum chucks in wet processing equipment ■ Suitable for suction of gases containing water droplets and water vapor *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.
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basic information
【Specifications】 ○ Composed of a water-sealed pump, control valve, water flow meter, vacuum pressure gauge, etc. ○ Motor output: 1.45KW/1.85KW (50/60HZ) ○ Maximum pressure: 3.3kPa ○ Exhaust rate: 48m³/h, 59m³/h (50/60HZ) ○ Connection diameter: 25mm ○ Water supply: 3.83LP, 0.2?0.5MPa ○ Weight: Approximately 50Kg ○ External dimensions: D484×H218×W186 ○ Noise level: 65dB/69dB (50/60HZ) ○ Power supply voltage: 185?220V 3-phase Δ connection ○ Rated current: 6.4A/8.2A (50/60HZ) ○ Ambient temperature: 40℃
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Applications/Examples of results
【Usage】 ■ Dicer (embedded in equipment) ■ Wet processing equipment 【Examples of Achievements】 Used as embedded equipment
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| Model number | overview |
|---|---|
| P94 |
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"Surely, for what is in the future." With this theme, we focus on the design and manufacturing of semiconductor manufacturing equipment and related devices, developing products that meet our customers' needs. We hope that the technologies we possess can be commercialized in various fields and be of benefit to our customers. Our entire staff is passionately engaged in the process of turning our customers' ideas into products, including research and development and prototyping. We sincerely look forward to your inquiries.