Cluster-type composite process device equipped with a vacuum transport robot.
Cluster-type composite process equipment capable of accommodating a total of six chambers, including a load lock chamber, around the center chamber. 【Features】 - Gate valves are placed between the center chamber and each chamber to prevent contamination. - Gate valves are integrated within the center chamber to save space. - The main pump is installed at the top of the chamber for high maintenance accessibility. - Equipped with a uniquely developed vacuum transport robot. - Each chamber is equipped with an independent vacuum exhaust system. - Features a sputtering film deposition unit with a film thickness distribution of ±3%. - Includes a lamp annealing unit capable of heating up to 1000°C. - Equipped with a cassette load lock chamber that can accommodate 13 φ300mm silicon wafers. For more functions and details, please download the catalog.
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Cluster-type composite process equipment capable of accommodating a total of six chambers, including a load lock chamber, around the center chamber. 【Features】 ○ Gate valves are placed between the center chamber and each chamber to prevent contamination. ○ Gate valves are integrated within the center chamber to achieve space-saving. ○ The main pump is installed at the top of the chamber for high maintenance accessibility. ○ Equipped with a uniquely developed vacuum transport robot. ○ Each chamber is equipped with an independent vacuum exhaust system. ○ A sputtering film deposition unit with a film thickness distribution of ±3% is included. ○ A lamp annealing unit capable of heating up to 1000°C is included. ○ A cassette load lock chamber capable of accommodating 13 φ300mm silicon wafers is equipped. ● For other functions and details, please download the catalog.
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The name of the new organization, Maple Co., Ltd., which aims to achieve development through a new stage in the field of precision processing and assembly, embodies the fundamental policy of "organizations are people" that has been inherited from the past, as well as the concept of "people think, people create." Make People. "Creating people" along with "people create." This attitude embedded in our company name symbolizes the way we aspire to shape our organization and business in the future.
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