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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. Special carbon products for semiconductor manufacturing process equipment.

Special carbon products for semiconductor manufacturing process equipment.

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last updated:Aug 02, 2022

メルセン・エフエムエー 本社
メルセン・エフエムエー 本社
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Melsen FMA Corporation supplies various products for semiconductor manufacturing process equipment and many other industries.

Graphite is the ideal material for applications that require heat resistance and corrosion resistance. In particular, the use of highly corrosion-resistant graphite is essential in applications that involve liquid chemicals or chemical gases.

    Other semiconductor manufacturing equipment
1_01_sc-semi-1_220.jpg

Special carbon products for semiconductor manufacturing process equipment.

1_01_sc-semi-1_220.jpg
1_01_sc-semi-1_220.jpg
  • Related Link - https://www.mersen.jp

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basic information

【Features】 ○ High thermal conductivity and electrical conductivity ○ High strength even at high temperatures, capable of high-temperature heating ○ Resistant to chemical gases and corrosion at high temperatures ○ Self-lubricating ○ Low thermal expansion, resistant to thermal shock ● For more details, please contact us.

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Coating products are mainly used in semiconductor manufacturing processes. SiC coatings are used in high-temperature oxidizing atmospheres, while Pyro-coat is used when uniform heat distribution is a priority. Recently, instead of conventional coatings, methods that involve impregnating with glass-like carbon may be chosen.

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メルセン・エフエムエー

メルセン・エフエムエー 本社

Other manufacturing

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Mersen FMA Co., Ltd. is a Japanese subsidiary wholly owned by the Mersen Group (France), a global leader in carbon and graphite products. The main product we handle, "isotropic graphite," is a material required in a wide variety of industries. Mersen FMA Co., Ltd. supplies various products for semiconductor manufacturing process equipment and many other industries. The Mersen Group (formerly known as Carbon Lorraine Group) is a pioneer in carbon and graphite (synthetic graphite) products, established in 1892. Today, it is a comprehensive manufacturer of carbon and graphite products and semiconductor protection fuses, with direct subsidiaries in over 50 countries worldwide.

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