For production equipment and research and development! Providing a series of processes in thin-film electronic component manufacturing!
Omura Giken's "Photolithography Process Equipment" is a system that provides a series of processes in thin-film electronic component manufacturing with high precision and reliability. We offer production equipment for cleaning, coating, developing, stripping, etching, as well as equipment for research and development. The "Fully Automatic Spin Etching Device" extracts wafers one by one, sprays chemicals while rotating, and automatically processes everything from etching to drying. [Features] ■ Provides a series of processes for thin-film electronic component manufacturing ■ Compatible with various equipment ■ Fully automatic spin etching device is also available in the lineup *For more details, please refer to the PDF document or feel free to contact us.
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basic information
**Process Flow and Corresponding Equipment** ■ Cleaning - Scrub type - Spray type - UV cleaning ■ Resist Coating - Spin coater - Roll coater - DIP coater ■ Pre-bake - Hot plate - Clean oven - IR furnace ■ Exposure ■ Development - Spray type - Paddle type ■ Post-bake - Hot plate - Clean oven ■ Etching - Spray type - Dip type ■ Stripping and Cleaning - Spray type *For more details, please refer to the PDF document or feel free to contact us.*
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Applications/Examples of results
【Usage】 ■Thin film electronic components *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Omura Giken Co., Ltd. is a company engaged in machining, high-pressure/special gas piping, welding, assembly, design, and the regeneration and ancillary work of used semiconductor manufacturing equipment. Our refined technology is adopted in many industries that require precision, meticulousness, and safety, including the semiconductor industry, liquid crystal displays, fuel cells, eco-related fields, food factories, various manufacturing plants, pharmaceutical research laboratories, and research institutions. Our motto is "Omura Giken when you're in trouble." We are committed to being more flexible, prompt, and advanced, always striving to achieve 100% customer satisfaction.
