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  5. Other semiconductor manufacturing equipment
  6. RP3500SA N2 Purge System Standalone

RP3500SA N2 Purge System Standalone

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last updated:Jan 14, 2022

ライト製作所 本社
ライト製作所 本社
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RP3500SA N2 Purge System Standalone

N2 Purge Load Port Compliant with SEMI for All FOUPs 【Features】 ○ Compatible with all FOUPs regardless of type ○ Gas is injected from the door side while the FOUP door is open, adopting a front purge method (up to 200 LPM injection) ○ Allows a large volume of gas to flow at once, significantly improving replacement time and total gas flow ○ Basically conforms to SEMI standards ● For other functions and details, please download the catalog.

    Other semiconductor manufacturing equipment
IMG_8601白抜き.png

RP3500SA N2 Purge System Standalone

IMG_8601白抜き.png
IMG_8601白抜き.png
  • Related Link - http://www.rightmfg.co.jp/enterprise/brand.html

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N2 Purge Load Port Compliant with SEMI for All FOUPs 【Features】 ○ Compatible with all FOUPs regardless of type ○ Gas is injected from the door side while the FOUP door is open Adopts front purge method (up to 200 LPM injection) ○ Allows for a large volume of gas to flow at once, significantly improving replacement time and total gas flow ○ Basically conforms to SEMI standards ● For other functions and details, please download the catalog.

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RP3500SA N2 Purge System Standalone

RP3500SA N2 Purge System Standalone

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ライト製作所

ライト製作所 本社

Manufacturing and processing contract

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Light Manufacturing Company is one of the few domestic mechatronics contract manufacturers that consistently handles everything from design and development of mechatronics equipment to parts machining, assembly, and adjustment. We contribute primarily to industries such as medical devices, semiconductor manufacturing equipment, optical devices, and LCD substrate manufacturing equipment. As professionals in mechatronics, we engage in contract manufacturing for leading system product manufacturers in Japan, as well as our own brand business under the Lighton brand, which includes ophthalmic optical equipment and semiconductor transport devices. Additionally, leveraging the know-how cultivated as a manufacturing company, we respond to customer needs by producing mass-production prototypes related to both businesses.

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