Microwave Ion-Radical Source IMIS-211Q
Quartz discharge tube type with chamber protrusion type magnetic field microwave excited ion and radical source 【Features】 ○ The plasma chamber is made of quartz, allowing for the generation of ions and radicals with minimal metal contamination. ○ Due to the special antenna structure and magnetic circuit, there is little leakage magnetic field. ○ With a completely metal-sealed structure, it can be used in various ultra-high vacuum devices such as MBE systems. ○ Easy to install air-cooled type. ○ By using a high-voltage power supply for acceleration (optional), ion acceleration is possible. It can also be used as a radical source. ○ Microwaves are supplied via coaxial cable, eliminating the need for cumbersome waveguide connections. ● For other functions and details, please download the catalog.
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Quartz discharge tube type with chamber protrusion type magnetic field microwave excited ion and radical source 【Features】 ○ The plasma chamber is made of quartz, allowing for the generation of ions and radicals with minimal metal contamination. ○ Due to the special antenna structure and magnetic circuit, there is little leakage magnetic field. ○ The completely metal-sealed structure allows for use in various ultra-high vacuum devices such as MBE systems. ○ Easy to install air-cooled design. ○ By using a high-voltage power supply for acceleration (optional), ion acceleration is possible. It can also be used as a radical source. ○ Microwaves are supplied via coaxial cable, eliminating the need for cumbersome waveguide connections. ● For other functions and details, please download the catalog.
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Applications/Examples of results
【Applications】 ○ Ion Sputtering ○ Etching ○ Film Deposition Assist
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Company information
In 1972, the first president, Horita, established Taisei Sangyo Co., Ltd. using the entrance of his home as a workplace, and since then, we have been dedicated to technology development and research. Initially, we were involved in the development of devices such as the Polack counter for the Meteorological Research Institute, starting our work in the field of atmospheric science. Subsequently, we expanded our work into the vacuum world by starting maintenance services for leak detectors. Around the 10th anniversary of our founding, work in ultra-high vacuum began to increase, and by the 15th anniversary, we were able to manufacture small devices. Currently, our scope of work has significantly expanded, not only covering ultra-high vacuum, MBE, CVD, ECR, and RF radical sources, but also advancing the development of functional components utilizing various plasmas, ions, or electrons. In the future, we aim to become a small enterprise that can truly compete in the world of cutting-edge technology.