Dispensing electric pump

basic information

The dispensing system (electric pump) used in photoresist coating/developing equipment is effective for replacing existing standard pumps in semiconductor production lines. Compared to equivalent pumps originally installed in the equipment, it is expected to provide high reproducibility and material reduction effects. It has a strong sales track record with major customers in overseas mainstream brands. Naturally, the introduction cost is also lower than expected, leading to a gradual increase in sales among customers in Japan. Particularly for high-viscosity materials, the domestic market share has expanded to 30%, and customers who have learned about this product tend to choose our services with high probability. Major semiconductor manufacturers in Japan (ranked 1st and 2nd) have already adopted this system across all their lines.

Price information

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Delivery Time

Applications/Examples of results

Customers in the same industry from Taiwan, South Korea, and the United States are replacing their existing coaters and developers with this product to improve and enhance functionality. The reasons are reproducibility and cost reduction of materials. This product takes about 8 to 16 hours for replacement and is maintenance-free, allowing for use until it breaks down. With a warranty of 6 million dispenses (MTBF), we can confidently recommend the replacement. There are also multiple products in the series with shipping records of over 5,000 units each, and they are well-loved worldwide.