Effective for evaluating the types, quantities, and chemical bonding states of elements on the sample surface (at a depth of about several nanometers).
XPS is a technique that measures the kinetic energy distribution of photoelectrons emitted by X-ray irradiation, providing insights into the types, quantities, and chemical bonding states of elements present on the sample surface (to a depth of about a few nanometers). Because it can provide information about chemical bonding states, it is also known as ESCA: Electron Spectroscopy for Chemical Analysis. - Qualitative and quantitative analysis of elements on solid surfaces (approximately 2 to 8 nm) is possible. - Chemical bonding state analysis is possible. - Non-destructive analysis is possible. - Measurement of depth distribution (using ion sputtering) is possible. - Measurement of insulators is possible. - Measurement under controlled atmospheres is possible.
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basic information
XPS measures the kinetic energy distribution of photoelectrons emitted by X-ray irradiation. The principle of photoelectron generation is as follows. The binding energy can be calculated from the energy of the incident X-rays and the kinetic energy of the photoelectrons (Equation (1)). Since hν is known, Eb can be determined by measuring Ek. Because Eb is a value unique to the element and its electronic state, insights into the identification of elements in the sample and their chemical bonding states can be obtained from this value.
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Applications/Examples of results
- Evaluation of the chemical state and products (deposits) on the plasma-etched surface - Confirmation of the cleaning effect on the wafer surface - Evaluation of the oxidation degree and film thickness of Si oxide films (such as SiON films) - Verification of the chemical state of the surface modification layer of metal films (such as Cu) - Investigation of the composition and chemical state at the electrode surface of secondary battery materials - Evaluation of the passive layer on the SUS surface - Investigation of the composition and chemical state of solar cell materials - Evaluation of the light-emitting characteristics and chemical state of organic EL films - Confirmation of the cleaning effect of masks for lithography - Evaluation of the condition of lubricants on the surface of magnetic disks - Investigation of the causes of performance degradation in water-repellent coatings on glass surfaces - Correlation evaluation of the components and optical properties of anti-reflective films - Evaluation of the composition and chemical state of photocatalytic films, etc.
Detailed information
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Please consult with us first. ★ We will start with a proposal for the analysis plan ★ We can also meet at your company, of course. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!
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We will hold a visiting seminar. ★ We offer free seminars with engineers tailored to our customers' needs ★ We will introduce analytical techniques and explain analytical data according to your requests. ◆ Examples of seminar content - A broad explanation of MST's analytical methods - A detailed explanation of specific analytical methods from the principles - An explanation of the analytical data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!
