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  6. [EBSD] Electron Backscatter Diffraction Method

[EBSD] Electron Backscatter Diffraction Method

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last updated:Apr 02, 2026

一般財団法人材料科学技術振興財団 MST
一般財団法人材料科学技術振興財団 MST
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It is possible to easily obtain crystal information over a wide area.

This is a method for orientation analysis of crystalline samples using EBSD. It allows for easier and broader acquisition of crystal information compared to electron diffraction methods. EBSP: Electron Backscatter Pattern, also referred to as SEM-OIM or OIM. - Measurement of the surface orientation of single crystal grains is possible. - Orientation measurement of the measurement area is possible. - Observation of crystal grain size is possible. - Observation of twin grain boundaries (corresponding grain boundaries) is possible. - Extraction of specific crystal orientations is possible. - Measurement of the rotation angle of adjacent crystal grains is possible. - Evaluation of grains larger than 10 nm is possible using transmission methods.

    Contract AnalysisContract measurementContract Inspection
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[EBSD] Electron Backscatter Diffraction Method

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  • Related Link - https://www.mst.or.jp/service/method/ebsd/
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basic information

When an electron beam is irradiated onto a sample inclined at approximately 60 to 70 degrees, diffracted electron beams are generated at each crystal plane in a region of about 50 nm or less from the sample surface. By analyzing this backscattered electron diffraction, information about the orientation analysis of crystalline samples can be obtained.

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Applications/Examples of results

- Evaluation of crystal grains in CIGS films (polycrystalline solar cells) - Measurement of lattice strain using SEM equipment - Observation of crystal grains in semiconductor device metal wiring - Investigation of crystal grain boundaries around voids - Crystal analysis of poly-Si TFT - Evaluation of crystallinity of unknown layers in alloy layers - Measurement of whisker orientation from cross-sections - Exploration of optimal conditions in metal material growth (film formation) technology - Analysis of time-dependent changes in metal thin films

Detailed information

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    Please consult with us first. ★ We will start with a proposal for an analysis plan ★ Meetings at your company are, of course, possible. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!

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    We will hold a visiting seminar. ★ We offer free seminars with engineers tailored to customer needs ★ We will introduce analytical techniques and explain analytical data according to your requests. ◆ Example seminar content - A broad explanation of MST's analytical methods - A detailed explanation of specific analytical methods from the principles - An explanation of the analytical data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!

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一般財団法人材料科学技術振興財団 MST

一般財団法人材料科学技術振興財団 MST

Testing, Analysis and Measurement

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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