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  6. [EMS] Emission Microscopy Method

[EMS] Emission Microscopy Method

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last updated:Mar 12, 2025

一般財団法人材料科学技術振興財団 MST
一般財団法人材料科学技術振興財団 MST
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Rapid identification of the malfunctioning area.

EMS is a method that quickly identifies the location of faults by detecting weak light emissions caused by abnormal operation of semiconductor devices. It is also referred to as EMMS, PEM, or EMI. - Only transparent materials can be evaluated in the measurement wavelength range (from the visible to near-infrared region). - It is possible to capture internal defects such as cracks, crystal defects, oxide film breakdown due to ESD, and shorts caused by Al spikes with low damage.

    Contract AnalysisContract measurementContract Inspection
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[EMS] Emission Microscopy Method

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  • Related Link - https://www.mst.or.jp/method/tabid/161/Default.asp…
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basic information

As light sources, there are those due to electric field accelerated carrier scattering relaxation emission in the space charge region, such as carrier electric field acceleration, current concentration, and F-N tunneling current; those due to band-to-band carrier recombination emission, such as forward bias in pn junctions and latch-up; and those due to thermal radiation caused by short circuits between wires and increased resistance due to wire thinning.

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Applications/Examples of results

■Identification of abnormal areas (leakage points) - Si power devices (transistors, MOSFETs, IGBTs, thyristors, etc.) - SiC power devices (Schottky barrier diodes, MOSFETs, etc.) - GaN light-emitting elements and GaN devices (LD, LED, HEMT, etc.) - Organic EL elements - MEMS (pressure sensors, accelerometers, etc.)

Detailed information

  • 打ち合わせ.jpg

    Please consult with us first. ★ We will start by proposing an analysis plan ★ We can, of course, meet with you at your company. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!

  • セミナー.jpg

    We will hold a visiting seminar. ★ We offer free seminars with engineers visiting to meet customer needs ★ We will introduce analysis techniques and explain analysis data according to your requests. ◆ Example seminar content - A broad explanation of MST analysis methods - A detailed explanation of specific analysis methods from the principles - An explanation of the analysis data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!

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一般財団法人材料科学技術振興財団 MST

一般財団法人材料科学技術振興財団 MST

Testing, Analysis and Measurement

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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