Visualizing career distribution in two dimensions
SCM/SNDM is a method that scans the surface of semiconductors using a conductive probe to visualize the carrier distribution in two dimensions. - SCM is sensitive to carrier concentrations of approximately 10^15 to 10^20 cm^-3, while SNDM is sensitive to concentrations of about 10^14 to 10^20 cm^-3. - It is possible to identify the polarity of the semiconductor (p-type/n-type). - A signal correlated with carrier concentration can be obtained, but quantitative evaluation is not possible. - AFM images can also be acquired.
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basic information
■Visualization of Carrier Distribution Due to Changes in Electric Capacitance The contact point between the probe and the semiconductor forms a MOS structure, which can be regarded as a system where the capacitance of the oxide film on the semiconductor surface (COx) is connected to the capacitance of the semiconductor (CD). When a high-frequency voltage (VAC) is applied to this system, the equivalent capacitance (C) fluctuates. This fluctuation is nothing but the vibration of carriers in the semiconductor directly beneath the probe, and the magnitude of the fluctuation depends on the carrier concentration directly beneath the probe. By scanning the probe and measuring the modulation signal of the high-frequency resonator caused by the fluctuation (ΔC) of the equivalent capacitance (C), the carrier distribution can be visualized in two dimensions.
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Applications/Examples of results
- Determination of p/n polarity of the diffusion layer - Evaluation of the diffusion layer shape at specific locations within the LSI - Evaluation of the diffusion layer shape of individual semiconductors (bipolar transistors, diodes, DMOS, IGBTs, etc.) - Evaluation of the diffusion layer shape of defective areas in semiconductor devices (injection anomalies, leakage defects, etc.) - Evaluation of the diffusion layer shape of TFTs (visualization of the LDD region) - Evaluation of polarization in ferroelectric materials
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Please consult with us first. ★ We will start with a proposal for an analysis plan ★ We can also meet at your company, of course. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!
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We will hold a visiting seminar. ★ We offer free seminars with engineers tailored to our customers' needs ★ We will introduce analysis techniques and explain analysis data according to your requests. ◆ Example seminar content - A broad explanation of MST analysis methods - A detailed explanation of specific analysis methods from the principles - Explanation of the analysis data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!
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