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  6. White light interferometry

White light interferometry

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last updated:Apr 02, 2026

一般財団法人材料科学技術振興財団 MST
一般財団法人材料科学技術振興財団 MST
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Non-contact and non-destructive 3D measurement is possible.

The white light interferometry measurement method is a device that enables non-contact (non-destructive) three-dimensional measurement of sample surfaces with "wide field of view, high vertical resolution, and wide dynamic range" using a high-brightness white light source. - Surface shape measurement device using a high-brightness white light source - Capable of three-dimensional measurement in a non-contact and non-destructive manner - Wide field of view (50μm×70μm to 5mm×7mm) - High vertical resolution (0.1nm) - Wide dynamic range (<150μm)

    Contract AnalysisContract measurementContract Inspection
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White light interferometry

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  • Related Link - https://www.mst.or.jp/service/method/white-light-i…
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basic information

A scanning white light interferometer is a method that uses a high-brightness white light source to perform non-contact (non-destructive) three-dimensional measurements of the sample surface with "wide field of view, high vertical resolution, and wide dynamic range."

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Applications/Examples of results

- Semiconductors, etc. Roughness of polished surfaces of wafers, etc. and surface of deposited films Observation of defects and abnormalities Observation of processed shapes (patterns, holes, trenches, bevels, MEMS) - Metals Surface shapes of ball bearings and bonding (solder) Scratches on gears, cutters, steel plates, fracture surfaces, and shapes of molds Roughness of plated surfaces and observation of friction surfaces - Other materials Observation of cutting surfaces Shape observation of glass, optical components, and electrical components

Detailed information

  • 打ち合わせ.jpg

    Please consult with us first. ★ We will start with a proposal for an analysis plan ★ We can, of course, meet at your company for discussions. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!

  • セミナー.jpg

    We will hold a visiting seminar. ★We offer free seminars with engineers visiting to meet customer needs★ We will introduce analytical techniques and explain analytical data according to your requests. ◆Examples of seminar content - A broad explanation of MST analytical methods - A detailed explanation of specific analytical methods from the principles - Explanation of the analytical data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!

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一般財団法人材料科学技術振興財団 MST

一般財団法人材料科学技術振興財団 MST

Testing, Analysis and Measurement

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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