It is a method for conducting elemental analysis and compositional analysis by detecting characteristic X-rays generated by electron beam irradiation and spectrally analyzing them by energy.
EDX is a method for performing elemental and compositional analysis by detecting characteristic X-rays generated by electron beam irradiation and spectrally analyzing them by energy. It is also referred to as EDS: Energy Dispersive X-ray Spectroscopy. In many cases, it is attached to SEM or TEM, and this document will explain EDX attached to SEM. - The entire energy measurement range (from B to U) can be measured simultaneously in a short time. - It has excellent detection efficiency, allowing measurements with a low probe current. - Analysis can be easily performed without the need for pretreatment, except for special samples. - It is suitable for the analysis of unknown samples. - Measurements can be conducted in a frozen or cooled state using a cryo holder.
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basic information
EDX spectrally detects characteristic X-rays generated by electron beam irradiation based on their energy. The energy of specific X-rays is unique to each element, allowing for the identification of the elements that make up the sample. Additionally, information about the composition can be obtained from the intensity.
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Applications/Examples of results
- Composition analysis of foreign substances - Visualization of elemental distribution through surface analysis - Visualization of migration through surface analysis - Further semi-quantitative analysis from qualitative analysis - Identification of layered structures - Identification of components in abnormal layers and residues
Detailed information
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Please consult with us first. ★ We will start by proposing an analysis plan ★ We can, of course, meet at your company for discussions. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!
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We will conduct a visiting seminar. ★ We offer free seminars with engineers visiting to meet your needs ★ Depending on your requests, we will introduce analysis techniques and explain analysis data. ◆ Example seminar content - A broad explanation of MST analysis methods - A detailed explanation of specific analysis methods from the principles - An explanation of the analysis data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!
