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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Electron beam lithography equipment
  6. Active Magnetic Shield (Magnetic Field Canceller)

Active Magnetic Shield (Magnetic Field Canceller)

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last updated:Jul 06, 2022

オータマ
オータマ
  • Official site

A magnetic field generator that detects fluctuations in external disturbance magnetic fields, generates a counteracting magnetic field to control and stabilize the magnetic field variations.

▼Features of Active Magnetic Shielding (Magnetic Field Canceller)▼ - Quick on-site installation - Does not compromise the operability of electron beam devices - Low cost - Excellent aesthetics - Customizable size (it is also possible to implement the cancellation coils into the device frame) *For inquiries or consultations regarding the product, please use the contact form on our website. We also have materials available. 【Contact Us】https://www.ohtama.co.jp/contact.html 【Download Materials】https://www.ohtama.co.jp/download.html

    Electron beam lithography equipment
activemagnetic_img02.jpg

Active Magnetic Shield (Magnetic Field Canceller)

activemagnetic_img02.jpg
activemagnetic_img02.jpg
  • Related Link - https://www.ohtama.co.jp/products/active_magnetic.…

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basic information

In recent years, the performance of electron beam devices has significantly improved, while the allowable magnetic field values have become increasingly strict. This product is a magnetic field generator that detects fluctuations in the external magnetic field with high sensitivity using a 3-axis magnetic field controller, generates a counteracting magnetic field with Helmholtz coils configured in the XYZ three axes, and is used to control and stabilize the magnetic field fluctuations inside the coils. By introducing this product, it is possible to fully utilize the performance of electron beam devices even in environments where the magnetic field is significantly unstable. For other functions and details, please feel free to contact us.

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Applications/Examples of results

【Applications and Examples】 - Electron microscopes (SEM, TEM) - Semiconductor measurement and inspection equipment (length measurement SEM, defect review SEM) - Photomask equipment (repair equipment, length measurement SEM) and various other electron beam devices (EB devices, etc.) For other functions and details, please contact us.

Detailed information

  • アクティブ磁気シールドイメージ.jpg

    Active Magnetic Shield (Magnetic Field Canceller) Image

Company information

オータマ

オータマ

Ferrous/Non-ferrous metals

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Ohtama is a specialized manufacturer of magnetic shields made from permalloy. We provide a consistent process of measurement, design, and production! In 2015, the Hachioji Minamino factory was completed and began operations.

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