It is a cleaning tool for sheet and flat feeding from small substrates to large LCD panels.
The Fine Series Cleaning Unit "Fine Score" is a bar-type high-throughput model ideal for large LCD glass cleaning. The cleaning area can be selected up to 2210mm, making it perfect for single-sheet cleaning of LCD glass and similar materials. It employs a bar-type, nozzle injection cleaning method, and since the cleaning solution is sprayed from nozzles in the air, there is no risk of recontamination in the cleaning tank. It allows for fine output adjustments with stable output control in 1W increments. The communication functions have also been enhanced, enabling monitoring of the oscillator status and external settings. It complies with various standards (FCC/CE/RoHS). For more details, please contact us or refer to the catalog.
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basic information
【Features】 - Cleaning tools for sheets ranging from small substrates to large LCD panels - Bar-type high throughput model ideal for cleaning large LCD glass - Cleaning width selectable from 160 mm to 2210 mm - Optimal for sheet-type cleaning of LCD glass and similar materials - Bar-type and nozzle injection cleaning methods - Cleaning solution is injected from nozzles in the air, preventing recontamination in the cleaning tank - Fine size variations available - Capable of precise output adjustments with stable output control in 1W increments - Increased maximum output: expansion of cleaning area and cost reduction - Enhanced communication functions allow for monitoring of oscillator status and external settings - Compliant with various standards (FCC/CE/RoHS) ● For more details, please contact us or refer to the catalog.
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Applications/Examples of results
【Applications】 ○ LCD, TFT (before and after film formation), CF, array, etc. ○ Cleaning before diffusion and after ion implantation in semiconductor devices ○ Cleaning after mirror processing of SI wafers, GaAs, etc. ○ Reticle cleaning before film formation of various photomasks ○ Cleaning before film formation and final cleaning of magnetic disks ○ Substrate cleaning for FPD ○ Cleaning of various wafers ● For more details, please contact us or refer to the catalog.
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Since its establishment in 1982, Pretech has consistently created super cleaning systems in various fields of ultra-precision cleaning. In particular, our fine series of megasonic cleaning and cassette-less cleaning have been developed early on and have received high praise both domestically and internationally. Additionally, Pretech promotes the development of new technologies based on industry-academia collaborative research. We are engaged in joint development with Tohoku University on energy-saving, high-quality sheet-type cleaning machines, as well as with Yamagata University, Tokyo Institute of Technology, and Chuo University. Moving forward, we aim to realize three policies: a thorough commitment to customer-first priority, the establishment and maintenance of a quality assurance system, and the development and application of cutting-edge technologies. We strive to create and provide attractive products that earn the trust and satisfaction of our customers, while also contributing to society by improving the environment and health and safety. To grow and develop as a true venture company, we will continue our research and development of cutting-edge technologies in precision cleaning, promoting Japanese-origin technologies to the world, and making Japan a solid technological nation through the collective efforts of all our employees.