A plasma cleaner that can be customized to meet your needs.
- Tabletop, low-cost, high-performance type - Usable from experimental to full-scale production - RIE mode standard (DP mode switch is optional) - Equipped with two mass flow meters for argon and oxygen - Standard oil rotary pump included We also customize based on standard models to meet customer requirements. Our company offers a wide range of products from small batch systems to medium and large batch systems, as well as various automated machines. The chamber structure supports a variety of types, including quartz barrels, parallel plates, and load-lock types. We also provide atmospheric pressure plasma options.
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basic information
This device aims to significantly improve productivity and quality by protecting the environment with dry cleaning plasma technology, and enhancing processes such as ashing and etching in semiconductor and electronic device manufacturing, as well as improving adhesion (hydrophilicity) of printing and coating materials through lens, medical instruments, tubes, powder cleaning, and surface modification.
Price information
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Delivery Time
P4
Applications/Examples of results
- Surface cleaning of substrate boards and lead frames - Improvement of adhesion between substrate boards and sealing resin - Improvement of wettability of underfill materials - Ashing of photoresist - Etching of metal oxides - Improvement of adhesive effects - Surface modification of resins/films - Improvement of wettability
Company information
We have received high praise from semiconductor manufacturers for our development of IC sockets for semiconductor evaluation. Currently, we flexibly and swiftly respond to the diverse needs of automotive electronics, image sensors, and semiconductor manufacturers, providing a comprehensive proposal of materials necessary for development, prototyping, evaluation, production, and shipping. We also boldly challenge ourselves in the development of new products, supporting the rapidly changing electronics industry. Additionally, as of October 1, 2006, Yamato Glass has changed its company name to Yamato Material Co., Ltd. to aim for greater possibilities, with the goal of further business expansion alongside the penetration of an accurate corporate brand image.