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Atmospheric pressure plasma device

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AP500

last updated:Sep 18, 2009

ヤマトマテリアル
ヤマトマテリアル
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Atmospheric pressure plasma device

In addition to conventional low-pressure plasma, atmospheric pressure (normal pressure) plasma is being developed in collaboration between industry and academia. Due to the thermal non-equilibrium of atmospheric pressure glow discharge plasma, low-temperature processing is possible.

    Other semiconductorsOther semiconductor manufacturing equipmentOther cleaning machines
im_joatsu3.jpg

Atmospheric pressure plasma device

im_joatsu3.jpg
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By utilizing the high activity of high-energy electrons and radicals/ions in plasma, applications across various fields, including electronic materials, are possible.

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Applications/Examples of results

- Surface treatment of polymer materials - Glass cleaning related to FPD - Ashing treatment - Surface cleaning treatment (oxidation or reduction treatment)

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ヤマトマテリアル

ヤマトマテリアル

Electronic Components and Semiconductors

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We have received high praise from semiconductor manufacturers for our development of IC sockets for semiconductor evaluation. Currently, we flexibly and swiftly respond to the diverse needs of automotive electronics, image sensors, and semiconductor manufacturers, providing a comprehensive proposal of materials necessary for development, prototyping, evaluation, production, and shipping. We also boldly challenge ourselves in the development of new products, supporting the rapidly changing electronics industry. Additionally, as of October 1, 2006, Yamato Glass has changed its company name to Yamato Material Co., Ltd. to aim for greater possibilities, with the goal of further business expansion alongside the penetration of an accurate corporate brand image.

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