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  6. LM guide for medium to low vacuum

LM guide for medium to low vacuum

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HSR15M1R-VV

last updated:Jul 16, 2010

THK
THK
  • Official site

Achieving stable rolling resistance under atmospheric pressure to vacuum conditions.

The adoption of newly developed low to medium vacuum dedicated labyrinth end seals and low to medium vacuum grease has achieved stable rolling resistance.

    Semiconductor inspection/test equipmentOther semiconductor manufacturing equipmentOther clean room equipment and facilities
vacuum_1.jpg

LM guide for medium to low vacuum

vacuum_1.jpg
vacuum_1.jpg

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basic information

● Usable in a wide range of environments from atmospheric pressure to vacuum. ● Capable of withstanding baking temperatures up to 200℃*. ● The newly developed labyrinth end seal for medium to low vacuum improves grease retention and allows for long-term use in a vacuum. ● The adoption of newly developed grease for medium to low vacuum achieves stable rolling resistance. *If the baking temperature exceeds 100℃, please multiply the basic rated load by the temperature coefficient.

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Various semiconductor manufacturing and inspection equipment

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THK

THK

Machine elements and parts

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THK pioneered the "rolling" of linear motion components in machines in 1972 and developed the "linear motion system." The development of this "linear motion system" has led to increased precision, speed, labor-saving, and improved efficiency in machinery, enabling energy-efficient equipment design. All of THK's technology is focused on providing greater lightness and precision to the "movement" of various mechanisms, bringing numerous innovations to the world. 【THK's Main Product Areas】 1. Mechanical Component Parts: - Development, manufacturing, and sales of LM guides, ball splines, ball screws, electric actuators, etc. 2. Mechatronics Related Products: - Precision XY stages, linear motor actuators, etc. 3. Automotive Parts: - Link balls, rod ends, etc. 4. Robotics: - Pick and place robots "PPR," transport robots "SIGNAS," service robots "SEED-Solutions" (including display robots and temperature measurement robots), etc. 5. Seismic Isolation: - Seismic isolation tables TSD, seismic isolation modules TGS.

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