Ideal for the process of 300mm size work!
Air slide stage that enables high speed stability and ultra-high precision positioning through the adoption of linear motor drive and air guide. 【Features】 ○ The work mounting table is supported by a granite base via air bearings, ensuring high movement parallelism and rigidity. ○ Both movable and drive parts are non-contact, contributing to dust prevention and noise reduction, making it suitable for use in clean rooms. ○ A full-floating method is adopted for the movable parts, allowing for high rigidity specifications and ultra-high precision finishing. ● For other functions and details, please download the catalog.
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Air slide stage that enables high speed stability and ultra-high precision positioning through the adoption of linear motor drive and air guide. 【Features】 ○ The work mounting table is supported by a granite base via air bearings, ensuring high movement parallelism and rigidity. ○ Both movable and drive parts are non-contact, contributing to dust prevention and noise reduction, making it suitable for use in clean rooms. ○ A full-floating method is adopted for the movable parts, allowing for high rigidity specifications and ultra-high precision finishing. ● For other functions and details, please download the catalog.
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Leveraging our experience in the development of semiconductor-related equipment, we established a company with a small team of production technology experts to undertake development tasks that are difficult for large corporations to accomplish in a short period of time, while also focusing on cost performance. Our motivation is to utilize our ideas to enter the market, promote Japanese production that can compete globally, and revive the declining "manufacturing Japan." We are challenging ourselves to develop and supply precision slide mechanisms that can respond to low costs and short delivery times, which large companies are unable to achieve.