List of Process Control Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Easy to install, no operation required! Equipped with various sensors and a built-in PLC, allowing for various automatic control of the valve independently.

• Pressure Control
• Flow Control
• Temperature and Humidity Control

An application that is concerned with all vibrations!

• Vibration Monitoring
• Anti-vibration, earthquake-proof, vibration-isolating devices

The common reheating function found in home bathtubs has been commercialized for professional use!

• Temperature and Humidity Control

A fast and reliable solver for model predictive control and embedded system optimization.

• Other process controls

Introducing products that contribute to saving gas costs and extending product lifespan! We are also offering materials that include information on topics such as "the benefits of automating gas switc...

• Pressure Control

High-precision measurement of thick film resist and polyimide up to 500μm thick without contact.

• Other process controls
• Other measurement, recording and measuring instruments

Up to 25 locations can be exposed with varying exposure conditions using open-frame exposure.

• Other process controls
• Spectroscopic Analysis Equipment

Equipped with an excimer lamp manufactured by Ushio Electric. A 193nm compatible analytical exposure device.

• Other process controls
• Spectroscopic Analysis Equipment

EQ-10 equipped with EUV light source, extreme ultraviolet light compatible analysis exposure device.

• Other process controls
• Spectroscopic Analysis Equipment

Photoresist Development Speed Analysis Evaluation Device

• Other process controls
• Analytical Equipment and Devices

We provide various devices for advanced evaluation of photoresists.

• Other process controls
• Spectroscopic Analysis Equipment

A revolutionary control valve that applies stepping motors to flow control.

• Flow Control

A revolutionary control valve that applies stepping motors to flow control | Minimizes dead space in the flow path and facilitates easy cleaning.

• Flow Control

A groundbreaking control valve that applies stepping motors to flow control.

• Flow Control

A groundbreaking control valve that applies stepping motors to flow control | Reduces temperature changes in fluids with a unique slide plate valve.

• Flow Control