List of pump products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Improvement of precursor liquid supply accuracy for ALD/CVD: Liquid volume adjustment in 0.3 nl increments and flow rate adjustment in 17 nl/min increments are possible. Ideal for optimized liquid del...

• Syringe Pump

Achieve high-precision liquid sample collection with easy operation.

• dispenser
• Syringe Pump
• Positive Displacement Pump

Tekan's 48,000-step high-resolution syringe pump. Compatible with 50 ml at a stroke of 6 cm. Proven track record of introduction to many analyzers.

• dispenser
• Syringe Pump
• Positive Displacement Pump

Tekan's 48,000-step high-resolution syringe pump. Compatible with 50 ml at a stroke of 6 cm. Proven track record in many analytical devices and FA (factory automation).

• dispenser
• Syringe Pump
• Positive Displacement Pump

Ideal management of plating solutions for semiconductors and electronic components with high reproducibility and precise flow control of the liquid delivery.

• dispenser
• Syringe Pump
• Positive Displacement Pump

Ideal management of plating solutions for semiconductors and electronic components with high reproducibility and precise flow control of liquid delivery.

• dispenser
• Syringe Pump
• Positive Displacement Pump

A syringe pump that allows for free adjustment of the discharge liquid flow rate in units of 0.3 nl/second and can also monitor the discharge volume.

• dispenser
• Syringe Pump
• Positive Displacement Pump

Syringe pump for adjusting the discharge volume from 1nl and monitoring the discharge volume.

• dispenser
• Syringe Pump
• Positive Displacement Pump

The flow rate of the expelled liquid can be adjusted to 0.3 μl/min, minimizing the use of expensive photoresist with nanoliter-level liquid volume adjustments!

• dispenser
• Syringe Pump
• Positive Displacement Pump

The flow rate of the ejected liquid can be adjusted to 0.3 μl/min, minimizing the use of expensive photoresist with nanoliter-level liquid volume adjustments!

• dispenser
• Syringe Pump
• Positive Displacement Pump

Contributes to maintaining purity in semiconductor manufacturing lines with a high-precision syringe pump.

• dispenser
• Syringe Pump
• Positive Displacement Pump

High-concentration slurry pump that enables the transport of various liquids such as sludge.

• Other pumps

[For liquids] Compact, diaphragm multi-pump significantly reduces pulsation! Variable speed and abnormal detection are standard features. A new standard for smart pumps.

• Other pumps

[FOOMA 2026 Exhibition] Pump solutions that contribute to high performance, cost reduction, energy efficiency, and improved maintainability!

• Other pumps
• Other Pumps
• pump

High performance × cost reduction × energy efficiency × improved maintainability!

• Other pumps
• Other Pumps
• pump