List of Semiconductor Manufacturing Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

For research and development, for small-scale batches! Standard equipped with a simple decontamination unit ALD Shield Vapor Trap.

• Other semiconductor manufacturing equipment

Substrate bias mechanism! Introducing our microwave PECVD/etching equipment.

• Etching Equipment

Introducing the ion beam sputtering device equipped with a maximum of 5 targets (220mm diameter) or 4 targets (300mm diameter)!

• Sputtering Equipment

Maximum 200mm diameter substrate! Double ring magnetron (Fraunhofer FEP)

• Sputtering Equipment

Mechanical clamp or electrostatic chuck compatible! Sub-nanometer etching mechanism.

• Etching Equipment

Supports wafers up to 150 or 200 mm! Etching angle and stage tilt/rotation mechanism.

• Etching Equipment

Interlock covers are also available! We have achieved further efficiency in polishing operations.

• Wafer processing/polishing equipment
• Other processing machines

Ideal for sample preparation for research and development! Successfully reduced vibration and noise significantly.

• Wafer processing/polishing equipment
• Other processing machines

High-precision angular bearings are adopted as the main axis! Achieving a flatness accuracy of ±10μm on the reference table.

• Wafer processing/polishing equipment
• Other processing machines

We offer a wide range of products, including vacuum chuck holders and adhesive holders!

• Wafer processing/polishing equipment
• Other processing machines
• Other machine elements

High-precision and high-efficiency polishing technology! A comprehensive catalog of precision polishing equipment is available as a gift.

• Wafer processing/polishing equipment

We will introduce a wide variety of grinding wheels, from fixed abrasive wheels to free abrasive wheels and polishing cloths.

• CMP Equipment
• Wafer processing/polishing equipment
• Other processing machines

More economical than manually spraying diamond liquid onto the grinding wheel! Introducing the automatic spraying device.

• Wafer processing/polishing equipment
• Other processing machines
• Other physicochemical equipment

There is no edge sagging, and there are no detachments of foreign substances, making it suitable for evaluation using methods such as EPMA!

• Wafer processing/polishing equipment
• Other processing machines

Samples for cross-sectional observation can be created precisely and easily! There is no need to touch or hold the samples directly by hand.

• Wafer processing/polishing equipment
• Other processing machines