List of Semiconductor Manufacturing Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

EFEM（Equipment Front End Module）

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

FOUP/FOSB compatible wafer transfer system (300mm wafer transfer system)

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

SMIF-compatible wafer sorter (SMIF-compatible wafer transfer device)

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

SMIF-compatible wafer sorter (SMIF-compatible wafer transfer device)

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

Wafer transfer machine (wafer sorter)

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

Wafer transfer machine (wafer sorter)

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

6-inch diameter PFA custom pressure vessel

• Other semiconductor manufacturing equipment
• Processing Contract

Plasma processing device (multi-purpose plasma etcher)

• Etching Equipment
• Ashing device
• Other processing machines

Precision cleaning

• Other semiconductor manufacturing equipment
• Surface treatment contract service

Single-wafer plasma etching processing device (single-wafer plasma etcher)

• Etching Equipment
• Ashing device
• Wafer processing/polishing equipment

Batch-type plasma ashing device for 50 wafers at once.

• Etching Equipment
• Ashing device
• Circuit board processing machine

Surface improvement component

• Other semiconductor manufacturing equipment
• Contract manufacturing

Substrate bonding (direct bonding, anodic bonding, vacuum sealing)

• Other semiconductor manufacturing equipment

Wafer surface modification and precision bonding equipment

• Wafer processing/polishing equipment

Film Continuous Deposition Device

• Other semiconductor manufacturing equipment