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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Successful Improvement Case Study Case 1 Organic Vapor Deposition Cell KOD-cell

Successful Improvement Case Study Case 1 Organic Vapor Deposition Cell KOD-cell

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Example 1: Organic Vapor Deposition Cell KOD-Cell

last updated:Oct 01, 2010

北野精機
北野精機
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Successful Improvement Case Study Case 1 Organic Vapor Deposition Cell KOD-cell

◆◇◆Background◆◇◆ Until now, we have been using large organic vapor deposition cells from other companies. However, due to the large crucible capacity unique to these large cells, we have been struggling with very poor temperature stability and material efficiency. In the case of organic materials, there are instances where the cost of materials can reach tens of thousands of yen per gram. Therefore, using a large deposition source with poor material efficiency requires filling as much as 10 grams of material for a single deposition. We would like to address this issue by using our company's organic vapor deposition cells.

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Successful Improvement Case Study Case 1 Organic Vapor Deposition Cell KOD-cell

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◆◇◆ Countermeasures ◆◇◆ We proposed the organic vapor deposition cell, KOD-Cell. The KOD-Cell has an extremely small crucible capacity of 1cc and uses a crucible material with good thermal conductivity, Shapal (machinable ceramics), which provides excellent temperature stability and handling. ◆◇◆ Results ◆◇◆ By installing a deposition nozzle to enhance the orientation at the tip of the KOD-Cell, its compactness and 1cc crucible capacity result in very good directionality and easy maintenance. Additionally, ultra-low rate deposition control has become possible through the combination of a film thickness controller and a temperature regulator, making it a product that is efficient in material use, easy to maintain, and environmentally friendly. Furthermore, it has received high praise from researchers who wish to conduct deposition experiments easily.

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[Comprehensive Catalog] Vacuum Equipment and Parts

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北野精機

北野精機

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The history of Kitano Seiki is also a trajectory of continuous contribution to cutting-edge research fields through the provision of precision instruments for research and development. In November 1958, we were established as a company specializing in the design, manufacturing, and sales of precision instruments. Since then, we have developed and manufactured experimental equipment aimed at research institutes in universities and government agencies, as well as basic research laboratories in private companies, earning high praise for our excellent quality and reliability. In particular, in recent years, we have been at the forefront of ultra-high vacuum and ultra-low temperature technologies, which are essential in industrial fields such as new materials, nanotechnology, flat panel displays, high-temperature superconductivity, solar cells, nuclear power, and space development. We have accumulated abundant technology and know-how in creating experimental environments and have linked this to the development and provision of equipment that condenses advanced performance and functionality. At Kitano Seiki, we always work closely with researchers, our users, to design and develop equipment that accurately supports research and development objectives. With a consistent system from parts manufacturing to various processing, assembly, inspection and testing, equipment setup, and after-sales support, we provide high-quality products and a conducive experimental environment for quality research and development.

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