List of Actuator products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Strong cold wind from room temperature to -13°C! Depending on the usage environment, you can choose between the combo type or the separate type!

• Cooling system

Achieving nano-level Z-chip tilt control. High-precision piezo stage with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

Piezo stage with an opening that achieves nano-level adjustments.

• Actuator
• Piezoelectric Devices
• encoder

Zero-friction flexure guide integrated structure. Improved calibration accuracy with high reproducibility nano-positioning.

• Other industrial robots
• Piezoelectric Devices
• Actuator

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Three-stage electric lifting device ideal for lifting heavy objects.

• Actuator

No need for brake or stopper! Self-locks at the stopped position during work elevation! Lighter operability than screw types, faster lifting speed, and space-saving achieved!

• Actuator

Minimum 10 nm resolution. High-precision Z-axis focus control of the laser processing head.

• Other machine elements
• Actuator
• Solenoid Actuators

Minimum 10 nm resolution, maximum 7 mm stroke. Achieving high-precision Z-axis focus control for semiconductor devices.

• Other machine elements
• Actuator
• Solenoid Actuators

Minimum 10nm operation, maximum 7mm movement, supports up to 1kg. High-precision Z-axis supporting fine observation.

• Other machine elements
• Actuator
• Solenoid Actuators

Enhancing the accuracy of cell observation and deep imaging — Nano-precision Z-axis focus stage

• Other machine elements
• Actuator
• Solenoid Actuators

A dedicated servo controller featuring a high-speed CPU has been introduced, enabling advanced load control, speed control, and positioning control with simple operation in a hydraulic servo system.

• Servo
• cylinder
• Actuator

Optimize the manufacturing process with a compact yet high-precision 6-axis positioning system.

• Actuator
• Other industrial robots
• encoder

A compact yet high-precision reference-class 6-axis positioning system.

• Actuator
• Other industrial robots
• encoder

Ultra-high rigidity × sub-nanometer resolution, ideal for microscope focus control.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ultra-high rigidity × sub-nanometer resolution, supporting precise operations in life science research.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ultra-high rigidity × sub-nanometer resolution, ideal for fine adjustments in optical systems.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Piezo actuators that achieve ultra-high rigidity, sub-nanometer resolution, humidity resistance, and long lifespan.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ultra-high rigidity × sub-nanometer resolution, achieving long lifespan even in harsh environments.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

90 µm stroke, µs response, sub-nanometer resolution positioning

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Precise adjustment of lens position with sub-nanometer resolution.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Maximum 90 µm stroke, high load capacity, sub-nanometer precision piezo actuator.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Nano positioning with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-precision nanopositioning with a maximum stroke of 35 µm and a resolution of 0.1 nm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-precision nanopositioning stage optimal for bioanalysis

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm - for micro scanning under a microscope.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm - for micro-positioning under a microscope.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-precision Z-focus scanner for semiconductor inspection equipment with sub-nanometer resolution and maximum 800 µm stroke capability.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, compatible with maximum 800 µm stroke, high-speed and high-precision PIFOC focus scanner.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, Z-direction maximum stroke of 800 µm, equipped with a flexure mechanism focus scanner.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, focus scanner P-725.xCDE2 with a maximum movement of 800 µm.

• Other machine elements
• Actuator
• Piezoelectric Devices

100 µm stroke, sub-nanometer resolution, high-response focus scanner at 560 Hz with a load of 210 g.

• Actuator
• Piezoelectric Devices
• encoder

100 µm stroke, 0.4 nm resolution, compatible with high-load objective lenses, high-speed and high-precision PIFOC focus scanner.

• Actuator
• Piezoelectric Devices
• encoder

High-load compatible sub-nanometer resolution focus scanner supporting nano-structure analysis

• Actuator
• Piezoelectric Devices
• encoder

High-load compatible, high-precision Z-focus scanner supporting high throughput in wafer inspection.

• Actuator
• Piezoelectric Devices
• encoder

Compact and high thrust. Low vibration with quick damping. Vibration and rigidity data materials are available. Sample lending is possible.

• Actuator

A high-speed optical alignment solution from PI that reduces alignment time by 99%.

• Optical Experimental Parts
• Other industrial robots
• Actuator

No adjustment needed, space-saving, high precision, high rigidity! Can be used with a cantilever structure.

• Actuator