List of Actuator products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Achieving nano-level Z-chip tilt control. High-precision piezo stage with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

30kg load capacity; ±0.1µm reproducibility of a 6-axis high-rigidity hexapod.

• Actuator
• Other industrial robots
• encoder

High-precision positioning of heavy objects up to 250 kg. Equipped with an absolute encoder.

• Actuator
• Other industrial robots
• encoder

±0.2µm reproducibility and 6-axis high precision control. For precise alignment of astronomical optical systems.

• Actuator
• Other industrial robots
• encoder

High-precision hexapod supporting advanced bioimaging with 6 degrees of freedom control.

• Actuator
• Other industrial robots
• encoder

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Achieving high-precision positioning in semiconductor manufacturing. Quick and accurate alignment operations.

• Actuator
• Piezoelectric Devices
• encoder

±0.2µm reproducibility, heavy-load compatible model with absolute encoder

• Actuator
• Other industrial robots
• encoder

High-rigidity hexapod achieving 6 degrees of freedom alignment with nanometer resolution.

• Actuator
• Other industrial robots
• encoder

Ideal for the field of nanotechnology. A linear stage that achieves both high generation power and sub-nanometer precision.

• Other machine elements
• Actuator
• Piezoelectric Devices

Linear stage for achieving high-precision positioning in cell observation.

• Other machine elements
• Actuator
• Piezoelectric Devices

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

For nano-precision scanning of microscope samples. Achieving stable positioning with 0.1nm resolution and high linearity.

• Actuator
• Piezoelectric Devices
• encoder

Sub-nanometer resolution positioning with a 90 µm stroke and 1000 N pressing force, with a microsecond response.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ultra-high rigidity × sub-nanometer resolution, long lifespan due to moisture resistance.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

For use in research, optical alignment, etc.! High-resolution, high-power linear actuators.

• Actuator

Compact linear stage with built-in limit switch and DC stepping motor!

• Actuator
• Cartesian Robot
• encoder

Motion angle: ±5 mrad (optical ±10 mrad), dynamic & high resolution & high-speed operation due to a resonance frequency of 10 kHz.

• Other industrial robots
• Piezoelectric Devices
• Actuator

Innovating nano positioning with a holding force of up to 800N and a resolution of 5nm.

• Actuator
• Piezoelectric Devices
• Other machine elements

Stroke up to 13mm, ideal for fine adjustments of mirrors and optical elements.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Inertial drive + incremental sensor for long-term stable fine-tuning control.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Short delivery time available. High-precision linear stage compatible with a wide range of application fields.

• Actuator

Hexapod H-811.x2IHP, ideal for the fields of photonics and precision assembly.

• Brushless DC Motor
• Actuator

With pressure-type piezo actuators (model names: P-840, P-841)

• Actuator
• controller

3000 N pressing force / 700 N pulling force, 90 µm movement with sub-nanometer resolution, µs response.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

A stroke of 100 µm, a system resolution of 0.4 nm, and a resonance frequency of 560 Hz even at a load of 210 g.

• Actuator
• Piezoelectric Devices
• encoder

15–38 µm stroke, 0.1 nm resolution, compact high-speed response piezo stage

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-speed piezo stage with a maximum stroke of 35 µm, a resolution of 0.1 nm, and a load capacity of 10 N.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

A high dynamic system with a center opening that suppresses vibration to the limit. It achieves a linear stroke of 100 x 100 μm.

• Actuator
• Piezoelectric Devices
• encoder

Built-in actuator with a maximum speed of 12 mm/s and a driving force of 50 N for nano-positioning operations.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-resolution incremental linear encoder! The unidirectional reproducibility is 0.1μm.

• Linear motor
• Actuator
• Cartesian Robot

Achieve high stability with a distortion-free aluminum base! High specifications unique to German manufacturing!

• Actuator
• Cartesian Robot
• encoder

Single-sided and double-sided, upright and low-profile, high-precision alignment routine.

• Optical Experimental Parts
• Other industrial robots
• Actuator

Based on customer feedback, we have improved the driving precision of the Hexapod! It now enables step movements of 40 nm on the XY axis and 20 nm on the Z axis.

• Actuator
• Other industrial robots
• encoder

Designed for high load applications with a load capacity and rigidity of 30kg.

• Actuator
• Other industrial robots
• encoder

High-precision 6-axis control that achieves a maximum load capacity of 30kg and a reproducibility of ±0.1µm.

• Actuator
• Other industrial robots
• encoder

±0.2µm reproducibility, heavy load compatible model with standard absolute encoder.

• Actuator
• Other industrial robots
• encoder

Compact high-precision Z stage with a 13mm stroke.

• Actuator
• encoder
• Other machine elements

6DoF photonics alignment that achieves both nano-level precision and high-speed scanning.

• Optical Experimental Parts
• Other industrial robots
• Actuator

Innovating semiconductor manufacturing with sub-nanometer resolution positioning.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Stabilizing nano-level measurements with 0.1nm resolution and high linearity.

• Actuator
• Piezoelectric Devices
• encoder

Easy nano positioning with 0.1nm resolution and high stability control.

• Actuator
• Piezoelectric Devices
• encoder