List of Vacuum pump products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Industry-leading basic performance such as compression ratio, achieved vacuum level, and gas flow rate.

• Vacuum pump

Industry-leading basic performance

• Vacuum pump

Industry-leading basic performance

• Vacuum pump

Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Significantly reduced the deposition of reaction products generated in the process onto the pump through unique generation product countermeasures!

• Other pumps
• Vacuum Equipment
• Vacuum pump

A low-vibration pump that suppresses the vibration value to below 1nm. By installing an anti-vibration damper, it can be further reduced by one order of magnitude (0.1nm)!

• Other pumps
• Vacuum Equipment
• Vacuum pump

Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Ultra-high vacuum specification turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

High flow rate turbo molecular pump compatible with exhaust and low vibration.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Turbo molecular pump developed for use in radiation environments!

• Other pumps
• Vacuum Equipment
• Vacuum pump

Equipped with user flexibility, consistent performance anywhere in the world.

• Vacuum pump

We provide solutions for demanding chemical process applications with a combination of vacuum pumps and vacuum solutions that have a proven track record overseas.

• Other pumps
• Vacuum pump
• Positive Displacement Pump

We will introduce vacuum solutions related to the manufacturing process of lithium batteries.

• Vacuum pump
• Other pumps
• Positive Displacement Pump