List of Sputtering Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

It is an introduction device that transmits linear motion from the atmospheric side to samples and equipment in a vacuum.

• Sputtering Equipment
• CVD Equipment
• Other semiconductor manufacturing equipment

For adjusting shaft misalignment and angle when installing a magnetic coupling linear rotary introducer (MFL)!

• Sputtering Equipment
• Other semiconductor manufacturing equipment

Please use it for deposition protection and light/beam blocking for the viewing port.

• CVD Equipment
• Sputtering Equipment
• Other semiconductor manufacturing equipment

We will manufacture a vacuum chamber.

• CVD Equipment
• Sputtering Equipment
• Other semiconductor manufacturing equipment

Conductive carbon thin films are formed by sputtering. Stable film formation is achieved through a simple process with inert gas and carbon target at low temperatures (below 400°C).

• Sputtering Equipment
• Plasma surface treatment equipment
• Other processing machines

Aluminum precision parts for semiconductor manufacturing equipment, Osaka. [Leave cost reduction to Philir Co., Ltd.]

• Sputtering Equipment
• Ion implantation equipment
• Evaporation Equipment

Development of new thin films using simultaneous three-source sputtering! Customizable according to experimental content and budget.

• Sputtering Equipment

Multi-layer film deposition using a maximum of 5 yuan cathodes. Wear resistance, heat resistance, and smooth thin films. High throughput even for high-temperature deposition with a load lock type.

• Sputtering Equipment
• Plasma surface treatment equipment

From discrete components to advanced devices, from R&D to mass production. A compact, high-quality, multi-purpose CtoC type sputtering system.

• Sputtering Equipment
• Plasma surface treatment equipment
• Other mounting machines

Currently responding to sample tests, developing films and metal foils for flexible devices and advanced functional materials, and supporting mass production. Process support with demo equipment.

• Other processing machines
• Sputtering Equipment
• Plasma surface treatment equipment

A lineup with over 20 years of proven history. Customized processes and hardware for high-end niche processes from R&D to mass production.

• Sputtering Equipment
• Plasma surface treatment equipment

AlN templates for UV-LEDs using sputtering. AlN films with high crystallinity and C-axis orientation can be created by sputtering. Latest model deposition equipment.

• Sputtering Equipment
• Plasma surface treatment equipment

Developed for the purpose of achieving high uniformity and excellent reproducibility in the deposition of optical multilayer films!

• Sputtering Equipment

Ideal for research and development of advanced thin film devices. A customizable single-sheet ultra-high vacuum inline system. Responding to demands with a wealth of options and flexible support.

• Sputtering Equipment
• Plasma surface treatment equipment

Multi-functional, compact, flexible support, a standard lineup with proven results and trust.

• Sputtering Equipment
• Plasma surface treatment equipment