List of CMP Equipment products

It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...

• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

You can monitor the COF (friction coefficient), pad surface temperature, polishing liquid temperature, and room temperature inside the device.

• CMP Equipment

This one machine handles everything from wrapping (rough polishing) to polishing, and is capable of precision polishing of compound semiconductors such as GaAs and InP.

• CMP Equipment

Excellent grinding efficiency and finish, extended dressing intervals, low cutting energy, minimal chipping, good uniformity, flatness, surface roughness, and excellent parallelism.

• Grindstone
• Grinding Machine
• CMP Equipment

We will introduce a wide variety of grinding wheels, from fixed abrasive wheels to free abrasive wheels and polishing cloths.

• CMP Equipment
• Wafer processing/polishing equipment
• Other processing machines

Ideal for polishing small samples! Designed and developed to allow one machine to be used for one purpose.

• Wafer processing/polishing equipment
• CMP Equipment
• Other processing machines

Dry in / dry out is possible! Equipment for mirror finishing of silicon wafers.

• CMP Equipment

Ultra-thin, IPX7 waterproof design, made of stainless steel, suitable for use in harsh environments. No foundation work required, easy to integrate into devices.

• Scale
• CMP Equipment
• Weight related measuring instruments

Precision parts processing / stainless steel processing / SUS processed products

• CMP Equipment
• Photomask
• Bonding Equipment

Machining / Polishing

• CMP Equipment
• Molding Equipment

Single items, small lots, lathe processing, precision cutting [Leave cost reduction to Firiru Co., Ltd.]

• Ion implantation equipment
• CMP Equipment
• Other semiconductor manufacturing equipment

Aluminum precision parts for semiconductor manufacturing equipment. [Leave cost reduction to Philir Co., Ltd.]

• Semiconductor inspection/test equipment
• Ion implantation equipment
• CMP Equipment

High-performance resins that are actively used in multiple fields such as semiconductors, aerospace, food, and medical applications! Capable of handling small batches through machining as well as mass...

• CMP Equipment

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment