List of Cartesian Robot products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Strong cold wind from room temperature to -13°C! Depending on the usage environment, you can choose between the combo type or the separate type!

• Cooling system

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

• Other machine elements
• Cartesian Robot
• encoder

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

• Other machine elements
• Cartesian Robot
• encoder

Contributes to the efficiency and stability of the assembly process with a compact, high-rigidity design and selectable motors (DC motor or stepping motor).

• Actuator
• Cartesian Robot
• encoder

A thin, high-precision linear motor stage that enables high-speed electronic component mounting.

• Linear motor
• Actuator
• Cartesian Robot

Air bearing stage optimal for scanning or high-resolution positioning.

• Other machine elements
• Cartesian Robot
• encoder

Air bearing stage that supports high-precision calibration work.

• Other machine elements
• Cartesian Robot
• encoder

For precise adjustment of optical systems. Air bearing stage that achieves high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

Ideal for precise positioning in optical systems. Compact high-precision linear stage with a width of 60mm and a maximum stroke of 200mm.

• Actuator
• Cartesian Robot
• encoder

High-precision positioning stage ideal for laser cutting and laser processing.

• Actuator
• Cartesian Robot
• encoder

Flexible combination of axis configuration and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

High-precision multi-axis system corresponding to the XY+Z configuration. Optimal configuration can be achieved according to the application.

• Linear motor
• Actuator
• Cartesian Robot

A multi-axis motion system that can be freely configured with the number of axes and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

Linear motor stage with a maximum stroke of 800mm, achieving high-speed and high-precision transport.

• Other machine elements
• Linear motor
• Cartesian Robot

High-speed 4 m/s × high resolution to enhance the precision of positioning in research and development.

• Other machine elements
• Linear motor
• Cartesian Robot

Achieving high-precision measurements with a resolution of 0.1 µm and a maximum speed of 4 m/s.

• Other machine elements
• Linear motor
• Cartesian Robot

Smooth and high-speed response even under high load of 600N with linear motor × high-precision encoder.

• Linear motor
• Actuator
• Cartesian Robot

Compact linear stage with a size of 60mm square, compatible with XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Compact linear stage compatible with XYZ axis, size 60mm square.

• Actuator
• Cartesian Robot
• encoder

High-Precision XY Stage V-P01 for Microscope Observation and Automatic Imaging

• Other machine elements
• Cartesian Robot
• encoder

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.

• Other machine elements
• Cartesian Robot
• encoder

Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.

• Other machine elements
• Cartesian Robot
• encoder

Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.

• Other machine elements
• Cartesian Robot
• encoder

Improving the precision of laser cutting. Achieving high-precision positioning of ±0.2 µm.

• Other machine elements
• Cartesian Robot
• encoder

A compact air bearing stage that achieves zero friction and high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

Zero friction, high-precision positioning. Revolutionizing the adjustment work of optical devices.

• Other machine elements
• Cartesian Robot
• encoder