List of Cartesian Robot products

We provide comprehensive support from design to manufacturing and maintenance!

• Contract manufacturing

It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...

• Sensors

High-speed and high-precision wafer inspection is achieved by V-P01.

• Other machine elements
• Cartesian Robot
• encoder

Zero wear with air levitation and linear motor. Maximum speed 2 m/s, sensor resolution 1 nm.

• Other machine elements
• Cartesian Robot
• encoder

Smooth and high-speed response even under high load of 600N (maximum) with linear motor × encoder.

• Linear motor
• Actuator
• Cartesian Robot

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

• Other machine elements
• Cartesian Robot
• encoder

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

• Other machine elements
• Cartesian Robot
• encoder

Contributes to the efficiency and stability of the assembly process with a compact, high-rigidity design and selectable motors (DC motor or stepping motor).

• Actuator
• Cartesian Robot
• encoder

A thin, high-precision linear motor stage that enables high-speed electronic component mounting.

• Linear motor
• Actuator
• Cartesian Robot

Air bearing stage optimal for scanning or high-resolution positioning.

• Other machine elements
• Cartesian Robot
• encoder

Air bearing stage that supports high-precision calibration work.

• Other machine elements
• Cartesian Robot
• encoder

For precise adjustment of optical systems. Air bearing stage that achieves high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

Ideal for precise positioning in optical systems. Compact high-precision linear stage with a width of 60mm and a maximum stroke of 200mm.

• Actuator
• Cartesian Robot
• encoder

High-precision positioning stage ideal for laser cutting and laser processing.

• Actuator
• Cartesian Robot
• encoder

Flexible combination of axis configuration and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

High-precision multi-axis system corresponding to the XY+Z configuration. Optimal configuration can be achieved according to the application.

• Linear motor
• Actuator
• Cartesian Robot

A multi-axis motion system that can be freely configured with the number of axes and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

Linear motor stage with a maximum stroke of 800mm, achieving high-speed and high-precision transport.

• Other machine elements
• Linear motor
• Cartesian Robot

High-speed 4 m/s × high resolution to enhance the precision of positioning in research and development.

• Other machine elements
• Linear motor
• Cartesian Robot

Achieving high-precision measurements with a resolution of 0.1 µm and a maximum speed of 4 m/s.

• Other machine elements
• Linear motor
• Cartesian Robot

Smooth and high-speed response even under high load of 600N with linear motor × high-precision encoder.

• Linear motor
• Actuator
• Cartesian Robot

Compact linear stage with a size of 60mm square, compatible with XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Compact linear stage compatible with XYZ axis, size 60mm square.

• Actuator
• Cartesian Robot
• encoder

High-Precision XY Stage V-P01 for Microscope Observation and Automatic Imaging

• Other machine elements
• Cartesian Robot
• encoder

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.

• Other machine elements
• Cartesian Robot
• encoder

Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.

• Other machine elements
• Cartesian Robot
• encoder

Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.

• Other machine elements
• Cartesian Robot
• encoder

Improving the precision of laser cutting. Achieving high-precision positioning of ±0.2 µm.

• Other machine elements
• Cartesian Robot
• encoder

A compact air bearing stage that achieves zero friction and high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

Zero friction, high-precision positioning. Revolutionizing the adjustment work of optical devices.

• Other machine elements
• Cartesian Robot
• encoder