List of Other industrial robots products

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• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

It can be used for transporting trays weighing 4 kgf or less within the vacuum chamber.

• Transport and handling robots
• Other industrial robots

It can be used for transporting wafers inside a vacuum chamber.

• Transport and handling robots
• Other industrial robots

Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.

• Transport and handling robots
• Other industrial robots

While it is a single arm, it maintains the functionality of a twin arm.

• Transport and handling robots
• Other industrial robots

Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.

• Transport and handling robots
• Other industrial robots

Optimal for wafer transport in semiconductor manufacturing equipment and inspection devices compatible with 300mm.

• Transport and handling robots
• Other industrial robots

It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

• Transport and handling robots
• Other industrial robots

It offers superior cost performance compared to conventional MHR.

• Transport and handling robots
• Other industrial robots

Optimal for wafer transport in an acidic or alkaline atmosphere during the LSI manufacturing process.

• Transport and handling robots
• Other industrial robots

It is suitable for wafer transport and allows for quick wafer exchange.

• Transport and handling robots
• Other industrial robots

It is possible to choose between base type and flange type according to the device layout.

• Transport and handling robots
• Other industrial robots

Suitable for small wafer transport, allowing for a compact device layout.

• Transport and handling robots
• Other industrial robots

It features an energy-saving design using a full-axis stepping motor.

• Transport and handling robots
• Other industrial robots

By reducing the footprint, the equipment layout can be downsized.

• Transport and handling robots
• Other industrial robots

The exchange of wafers can be done in a short time with two arms.

• Transport and handling robots
• Other industrial robots